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https://www.comsol.com/paper/download/12780/Steeneken.pdf
Parameter Extraction and Support-Loss in MEMS Resonators P.G. *Steeneken ,1, J.J.M. Ruigrok1, S. Kang1, J.T.M. van Beek1, J. Bontemps2 and J.J. Koning2 1 NXP S em ic o ndu t r s,R ahE v T l 2 NXP S emic o ndu t r s,D v E g& C h az j T l *Corresponding author: HTC 4 (WAG02), 5656 AE Eindhoven, The Netherlands, [email protected]
https://www.comsol.com/paper/parameter-extraction-and-support-loss-in-mems-resonators-2421
In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that the Q-factor as a result of support losses in a MEMS resonator can be determined using a matched boundary layer.
https://www.researchgate.net/publication/228901399_Parameter_Extraction_and_Support-Loss_in_MEMS_Resonators
Parameter Extraction and Support-Loss in MEMS Resonators. ... Parameter extraction of k i and m i. ... (MEMS) resonators have broad commercial applications for timing and inertial sensing. However ...
https://arxiv.org/abs/1304.7953
We gratefully acknowledge support from the Simons Foundation ... Parameter Extraction and Support-Loss in MEMS Resonators. Authors: P.G. Steeneken, J.J.M. Ruigrok, ... it is demonstrated that the Q-factor as a result of support losses in a MEMS resonator can be determined using a matched boundary layer. The method is applied to calculate the ...Cited by: 24
https://core.ac.uk/display/24821406
Parameter Extraction and Support-Loss in MEMS Resonators . By P. G. Steeneken, J ... In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that the Q-factor as a result of support losses in a MEMS resonator can be determined ...
https://www.sciencedirect.com/science/article/pii/S0022460X17306521
Revisit support loss in micro-beam resonators. • Take account of distribution of normal and shear stresses in the clamped end. • Consider coupling effect between normal and shear stresses in the clamped end. • Employ Perfectly Matched Layer (PML) technique to validate the analytical model.Cited by: 2
https://www.sciencedirect.com/science/article/pii/S0924424711000719
The method is applied to data obtained from the measured electrical transmission of fabricated SOI MEMS resonators. Parameter values deduced via direct extraction are then compared against those obtained by a full extraction procedure where de-embedding is first performed and followed by a Lorentzian fit to the data based on the classical ...Cited by: 28
https://www.nature.com/articles/s41598-019-38847-6
Feb 19, 2019 · Silicon Microelectromechanical Systems (MEMS) resonators have broad commercial applications for timing and inertial sensing. However, the performance of …Cited by: 4
https://www.researchgate.net/publication/331426107_Investigation_of_Orientation_Dependence_of_the_Thermal_Expansion_Coefficient_in_Silicon_MEMS_Resonators
Parameter Extraction and Support-Loss in MEMS Resonators. Article. Full-text available. Oct 2007; P.G. Steeneken; ... Nonlinearities in MEMS silicon resonators are caused by different effects ...
https://www.osapublishing.org/oe/abstract.cfm?uri=oe-27-4-4976
We theoretically investigate a new class of silicon waveguides for achieving Stimulated Brillouin Scattering (SBS) in the mid-infrared (MIR). The waveguide consists of a rectangular core supporting a low-loss optical mode, suspended in air by a series of transverse ribs. The ribs are patterned to form a finite quasi-one-dimensional phononic crystal, with the complete stopband suppressing the ...Author: M. K. Schmidt, C. G. Poulton, G. Z. Mashanovich, G. T. Reed, B. J. Eggleton, M. J. Steel
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