Parameter Extraction And Support Loss In Mems Resonators

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Parameter Extraction and Support-Loss in MEMS Resonators

    https://www.comsol.com/paper/download/12780/Steeneken.pdf
    Parameter Extraction and Support-Loss in MEMS Resonators P.G. *Steeneken ,1, J.J.M. Ruigrok1, S. Kang1, J.T.M. van Beek1, J. Bontemps2 and J.J. Koning2 1 NXP S em ic o ndu t r s,R ahE v T l 2 NXP S emic o ndu t r s,D v E g& C h az j T l *Corresponding author: HTC 4 (WAG02), 5656 AE Eindhoven, The Netherlands, [email protected]

Parameter Extraction and Support-Loss in MEMS Resonators

    https://www.comsol.com/paper/parameter-extraction-and-support-loss-in-mems-resonators-2421
    In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that the Q-factor as a result of support losses in a MEMS resonator can be determined using a matched boundary layer.

Parameter Extraction and Support-Loss in MEMS Resonators

    https://www.researchgate.net/publication/228901399_Parameter_Extraction_and_Support-Loss_in_MEMS_Resonators
    Parameter Extraction and Support-Loss in MEMS Resonators. ... Parameter extraction of k i and m i. ... (MEMS) resonators have broad commercial applications for timing and inertial sensing. However ...

[1304.7953] Parameter Extraction and Support-Loss in MEMS ...

    https://arxiv.org/abs/1304.7953
    We gratefully acknowledge support from the Simons Foundation ... Parameter Extraction and Support-Loss in MEMS Resonators. Authors: P.G. Steeneken, J.J.M. Ruigrok, ... it is demonstrated that the Q-factor as a result of support losses in a MEMS resonator can be determined using a matched boundary layer. The method is applied to calculate the ...Cited by: 24

Parameter Extraction and Support-Loss in MEMS Resonators ...

    https://core.ac.uk/display/24821406
    Parameter Extraction and Support-Loss in MEMS Resonators . By P. G. Steeneken, J ... In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that the Q-factor as a result of support losses in a MEMS resonator can be determined ...

Evaluation of support loss in micro-beam resonators: A revisit

    https://www.sciencedirect.com/science/article/pii/S0022460X17306521
    Revisit support loss in micro-beam resonators. • Take account of distribution of normal and shear stresses in the clamped end. • Consider coupling effect between normal and shear stresses in the clamped end. • Employ Perfectly Matched Layer (PML) technique to validate the analytical model.Cited by: 2

Direct parameter extraction in feedthrough-embedded ...

    https://www.sciencedirect.com/science/article/pii/S0924424711000719
    The method is applied to data obtained from the measured electrical transmission of fabricated SOI MEMS resonators. Parameter values deduced via direct extraction are then compared against those obtained by a full extraction procedure where de-embedding is first performed and followed by a Lorentzian fit to the data based on the classical ...Cited by: 28

Direct Detection of Akhiezer Damping in a Silicon MEMS ...

    https://www.nature.com/articles/s41598-019-38847-6
    Feb 19, 2019 · Silicon Microelectromechanical Systems (MEMS) resonators have broad commercial applications for timing and inertial sensing. However, the performance of …Cited by: 4

Investigation of Orientation Dependence of the Thermal ...

    https://www.researchgate.net/publication/331426107_Investigation_of_Orientation_Dependence_of_the_Thermal_Expansion_Coefficient_in_Silicon_MEMS_Resonators
    Parameter Extraction and Support-Loss in MEMS Resonators. Article. Full-text available. Oct 2007; P.G. Steeneken; ... Nonlinearities in MEMS silicon resonators are caused by different effects ...

OSA Suspended mid-infrared waveguides for Stimulated ...

    https://www.osapublishing.org/oe/abstract.cfm?uri=oe-27-4-4976
    We theoretically investigate a new class of silicon waveguides for achieving Stimulated Brillouin Scattering (SBS) in the mid-infrared (MIR). The waveguide consists of a rectangular core supporting a low-loss optical mode, suspended in air by a series of transverse ribs. The ribs are patterned to form a finite quasi-one-dimensional phononic crystal, with the complete stopband suppressing the ...Author: M. K. Schmidt, C. G. Poulton, G. Z. Mashanovich, G. T. Reed, B. J. Eggleton, M. J. Steel



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