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https://www.researchgate.net/publication/224747827_Through-support-coupled_micromechanical_filter_array
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http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.467.3479
Adjacent resonators are coupled by elastic deformation at the support, and filter bandwidth is defined by the spacing between resonating elements. We demonstrate a second-order through-support-coupled capacitively-transduced 1.72MHz 0.008%BW (Qfilter≈12000) bandpass flexural-mode beam filter array implemented on SOI.
https://asmedigitalcollection.asme.org/vibrationacoustics/article/140/5/051013/472468/Actuation-of-Higher-Harmonics-in-Large-Arrays-of
In this work, we investigate, both numerically and experimentally, the dynamics of a micromechanical cantilever array, elastically coupled through a flexible overhang. The array is composed of 100 beams with linearly varying length. The f L and f U are defined by the frequencies of the longest and the shortest cantilevers, respectively. Our ...Cited by: 6
https://www.sciencedirect.com/science/article/pii/S0924424717318575
Apr 15, 2018 · As we know that two identically uniform beams coupled through overhang support can be modelled as ... M.S. Hajhashemi, A. Amini, B. BahreyniA micromechanical bandpass filter with adjustable bandwidth and bidirectional ... M.L. RoukesElectrically tunable collective response in a coupled micromechanical array. J. Microelectromech. Syst., 11 (6 ...Cited by: 5
https://www.sciencedirect.com/science/article/pii/S0924424709005378
This relative 180° phase inversion mechanism can be further utilised in coupling resonator arrays to realize filter applications. A Free–Free (FF) beam resonator array is designed and fabricated to demonstrate the phase inversion in a wire-coupled resonator system as shown in Fig. 2A. The S-parameter experimental results and finite element analysis (FEA) mode shape simulation of the 1st …Cited by: 12
http://imems.gatech.edu/publications-patents
F. Ayazi and R. Tabrizian, “Micromechanical Resonators Having Piezoelectric Layers therein that Support Actuation and Sensing through a Longitudinal Piezoelectric Effect,” US …
https://www.researchgate.net/publication/4134775_High_frequency_filters_based_on_piezoelectrically_transduced_micromechanical_resonators
High frequency filters based on piezoelectrically transduced micromechanical resonators. ... on piezoelectrically transduced micromechanical ... support-coupled micromechanical filter array.
https://www.deepdyve.com/lp/elsevier/internal-electrical-and-mechanical-phase-inversion-for-coupled-PuG0Fk04nQ
Mar 01, 2010 · Read "Internal electrical and mechanical phase inversion for coupled resonator-array MEMS filters, Sensors and Actuators A: Physical" on DeepDyve, the largest online rental service for scholarly research with thousands of academic publications available at your fingertips.
https://people.eecs.berkeley.edu/~ctnguyen/Research/ConferencePubs/2009/ArrayStdDev.fcs09.linyang.ctnguyen.web.pdf
Enhancement of Micromechanical Resonator Manufacturing Precision Via Mechanically-Coupled Arraying Yang Lin1, Wei-Chang Li1, Bongsang Kim1, Yu-Wei Lin2, Zeying Ren1, and Clark T.-C. Nguyen1 1Department of Electrical Engineering and Computer Sciences University of California at Berkeley, Berkeley, CA 94720, USA
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